Semiconductor Support, Parts, Equipment, and Repair Services.

Phoenix Innovation, Inc. supports most major brands of semiconductor manufacturing equipment, such as AMAT, Axcelis, Lam, Novellus, TEL, Varian, and others. We provide consumable spare parts, overstock inventory, upgrades, and repair services for rebuildable assemblies. We mainly focus on Front-End process groups like CVD, PVD, Etch, Implant, CMP, and Diffusion. We sell and repair all types of ceramic and metal Heaters and Electrostatic Chucks (ESC's), Chamber Liners, Lift Assemblies, PVD Magnet...

Phoenix Innovation, Inc. supports most major brands of semiconductor manufacturing equipment, such as AMAT, Axcelis, Lam, Novellus, TEL, Varian, and others. We provide consumable spare parts, overstock inventory, upgrades, and repair services for rebuildable assemblies. We mainly focus on Front-End process groups like CVD, PVD, Etch, Implant, CMP, and Diffusion. We sell and repair all types of ceramic and metal Heaters and Electrostatic Chucks (ESC's), Chamber Liners, Lift Assemblies, PVD Magnets, Valves, Generators, Matches, etc. Please contact us for more information or a quote on your needs.