Vacuum coating systems (optical, tribological and DLC coatings)

Our specialization is in systems that combine PVD with PACVD (PECVD) technology. This allows coating your substrate with a metallic sub layer, followed by any type of silicon or carbon based intermediate or top layer. Substrate biasing capabilities for DC, Pulsed DC and RF applications or all integrated in one tool. Uniformity is very high and achieved by multiple substrate and sample rotations in different dimensions