PacTec specializes in the replacement of optical components and rebuilt lasers used on semiconductor manufacturing equipment.

Optical Components: PacTec has a wide selection of optical components used on photolithography and metrology equipment. We specialize in the replacement of i-line bandpass filters and interference filters. A majority of our inventory involves parts in the 365.5nm and 248nm wavelengths for micro-photolithography equipment. We manufacture 125mm and 165mm i-line bandpass filters and can customize the spectral characteristics of an i-line bandpass filter based on your requirements. Refurbished Las...

Optical Components: PacTec has a wide selection of optical components used on photolithography and metrology equipment. We specialize in the replacement of i-line bandpass filters and interference filters. A majority of our inventory involves parts in the 365.5nm and 248nm wavelengths for micro-photolithography equipment. We manufacture 125mm and 165mm i-line bandpass filters and can customize the spectral characteristics of an i-line bandpass filter based on your requirements. Refurbished Lasers: PacTec can provide refurbished lasers for metrology, off-axis and on-axis alignment and interferometry systems. Our refurbished lasers are used on photolithography and inspection equipment. All of our units come with a warranty. We support systems using DPSS, HeNe and argon gas lasers.