Legacy Semiconductor is a leading re-manufacturer of plasma etch systems used in the semiconductor industry.

Specializing in the sales and support of prevailing semiconductor etch equipment. Primarily Tegal® 9XX Series Plasma Etchers which have an installed base of over 1500 units world wide performing non-critical etch steps for a variety of semiconductor companies manufacturing components for a wide range of products, including; telecommunications, cellular telephones, networking products, notebook and desktop computers, video/multimedia, industrial instrumentation, automotive electronics, factory au...

Specializing in the sales and support of prevailing semiconductor etch equipment. Primarily Tegal® 9XX Series Plasma Etchers which have an installed base of over 1500 units world wide performing non-critical etch steps for a variety of semiconductor companies manufacturing components for a wide range of products, including; telecommunications, cellular telephones, networking products, notebook and desktop computers, video/multimedia, industrial instrumentation, automotive electronics, factory automation, process control, and military and space systems. Legacy Semiconductor provides the following completely refurbished 9XX Series Models; 900, 901, 903 and 915/965. Support is provided via a complete line of 9XX inventory of spares and consumable parts and repair services of all PC Boards and Modules along with Field Services. Technical support is provided online by visiting our "Technical Data" page or by contacting our technical staff by phone or email. Maintained in-house are fully functional test beds, including; 90X Table Top, 9X5 Batch Etcher and a 90X Through-the-Wall system. Standard system process gases are facilitated and used when final testing systems and performing repaired module testing. Legacy Semiconductor is managed by a group of individuals with a combined experience of 50+ years in the semiconductor industry and 30+ years of Tegal equipment experience. Together this combined experience and product/service offerings provides Tegal® 9XX system users unparalleled support within the secondary market.