Semiconductor Spares Store is an industry-leading provider of semiconductor process and manufacturing equipment. We carry OEM equipment for Metrology, Lithography, Ion Implantation, Etchers, Wafer Robots, Vacuum, Turbomolecular, AE Advanced Energy, AMAT Applied Materials, Nikon, SVG and TEL Tokyo Electron.

Wafer Process Systems Inc. manufactures a comprehensive line of standard wet process equipment as well as custom build to design equipment for various cleaning, etching and stripping applications commonly found in the Semiconductor, MEMS, Photonics, Solar Cell, Disc Drive and Flat Panel Display manufacturing industries. Wafer Process Systems Inc. performs in field modifications to existing equipment to accommodate process changes and/or safety and upgrades for our customers existing equipment without the need of extensive cost associated with the removal of existing equipment and installation of new equipment. Ask us about our periodic maintenance programs. Having trouble contacting your original equipment supplier for service related issues? Are you experiencing any of the following equipment related issues? * Programming or software related issues * Rebuilding your pneumatic pumps every month * Equipment leaking * Need periodic maintenance on your existing equipment If you answered yes to any of the above items, give WPS a call.

Specializing in the sales and support of prevailing semiconductor etch equipment. Primarily Tegal® 9XX Series Plasma Etchers which have an installed base of over 1500 units world wide performing non-critical etch steps for a variety of semiconductor companies manufacturing components for a wide range of products, including; telecommunications, cellular telephones, networking products, notebook and desktop computers, video/multimedia, industrial instrumentation, automotive electronics, factory automation, process control, and military and space systems. Legacy Semiconductor provides the following completely refurbished 9XX Series Models; 900, 901, 903 and 915/965. Support is provided via a complete line of 9XX inventory of spares and consumable parts and repair services of all PC Boards and Modules along with Field Services. Technical support is provided online by visiting our "Technical Data" page or by contacting our technical staff by phone or email. Maintained in-house are fully functional test beds, including; 90X Table Top, 9X5 Batch Etcher and a 90X Through-the-Wall system. Standard system process gases are facilitated and used when final testing systems and performing repaired module testing. Legacy Semiconductor is managed by a group of individuals with a combined experience of 50+ years in the semiconductor industry and 30+ years of Tegal equipment experience. Together this combined experience and product/service offerings provides Tegal® 9XX system users unparalleled support within the secondary market.